Viscous damping formula

ing force is negligible. At higher pressure, in the viscous regime, the inertial force of the gas on the resonator creates a damping effect, which lowers the resonance frequency. The relative resonance frequency shift in the viscous regime is given by f/f = 3R 3m bR 0T MP+ 9 2 R 0T/ f R MP, where m b is the mass of the cantilever, R 0

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